Fabrication of optical mosaic gratings: a self-referencing alignment method

Lei Shi1, Lijiang Zeng

  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China. danl03@mails.tsinghua.edu.cn

Optics Express
|June 7, 2011
PubMed
Summary

This study introduces a new method for fabricating large-area optical mosaic gratings. The technique uses latent image gratings as references to align the substrate during exposure. By integrating adjustment and exposure systems, the method minimizes drift errors and reduces system complexity. The results show that the method achieves high precision with minimal wavefront errors. The approach is cost-effective and compact, making it suitable for scalable fabrication processes. The authors propose that this method enhances the accuracy and reliability of grating production.

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