Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Engineered Strain in 2D Materials by Direct Growth on Deterministically Patterned Grayscale Topographies.

Advanced science (Weinheim, Baden-Wurttemberg, Germany)·2026
Same author

Substitution of human olfaction by the trigeminal system.

Science advances·2025
Same author

Fabrication of self-emulsifying lipid microstructure by stiffness-tunable mold for drug delivery applications.

Microsystems & nanoengineering·2025
Same author

Additive manufacturing of water-soluble 3D micro molds for complex-shaped lipid microparticles.

Nature communications·2025
Same author

Deterministic grayscale nanotopography to engineer mobilities in strained MoS<sub>2</sub> FETs.

Nature communications·2024
Same author

Electrowriting of SU-8 Microfibers.

Polymers·2024
Same journal

Lasing characteristics and stress-tuning effects in GaN beam microcavities.

Nanoscale·2026
Same journal

Unraveling the synergy of core doping and the motif shell in atomically precise PtAg nanoclusters for CF<sub>3</sub>-ketone alkynylation.

Nanoscale·2026
Same journal

A dual-functional heavy-metal-free quantum dot/TiO<sub>2</sub> hybrid system for simultaneous pollutant degradation and green hydrogen production.

Nanoscale·2026
Same journal

Rational design of spherical NiCoB@rGO nanocomposites for efficient electrochemical energy storage.

Nanoscale·2026
Same journal

Ligand-controlled engineering of Cu-H active sites on Cu<sub>25</sub> hydride nanoclusters for efficient CO<sub>2</sub> electroreduction.

Nanoscale·2026
Same journal

Isostructural Co/Ni-containing banana-shaped polyoxometalates for visible-light-driven hydrogen production.

Nanoscale·2026
See all related articles

Related Experiment Video

Updated: Jun 1, 2026

Stencil Micropatterning of Human Pluripotent Stem Cells for Probing Spatial Organization of Differentiation Fates
08:07

Stencil Micropatterning of Human Pluripotent Stem Cells for Probing Spatial Organization of Differentiation Fates

Published on: June 17, 2016

100 mm dynamic stencils pattern sub-micrometre structures.

Veronica Savu1, Shenqi Xie, Juergen Brugger

  • 1EPFL, BM 3.202, Station 17, Lausanne, Switzerland. veronica.savu@epfl.ch

Nanoscale
|June 16, 2011
PubMed
Summary
This summary is machine-generated.

Dynamic stencil lithography enables sub-micrometre patterning on a wafer scale. A novel micro-heater integrated into the stencil membrane effectively prevents aperture clogging, enhancing the technique's utility.

More Related Videos

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement
08:36

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

Published on: September 6, 2011

Related Experiment Videos

Last Updated: Jun 1, 2026

Stencil Micropatterning of Human Pluripotent Stem Cells for Probing Spatial Organization of Differentiation Fates
08:07

Stencil Micropatterning of Human Pluripotent Stem Cells for Probing Spatial Organization of Differentiation Fates

Published on: June 17, 2016

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement
08:36

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

Published on: September 6, 2011

Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Engineering

Background:

  • Dynamic stencil lithography (DSL) is an advanced patterning technique.
  • It utilizes a moving shadow mask for directional material deposition through stencil apertures.
  • Sub-micrometre, 2D patterning at wafer scale is achievable with DSL.

Purpose of the Study:

  • To demonstrate the fabrication of complex structures using DSL.
  • To address the limitation of aperture clogging in sub-micrometre DSL.
  • To present a novel solution for enhancing the operational lifetime of stencils.

Main Methods:

  • Demonstrated sub-micrometre, 2D patterning at 100 mm wafer scale.
  • Fabricated width-modulated height structures by 2D stencil trajectory.
  • Created variable-period gratings by translating apertures at different orientations.
  • Developed and integrated a micro-heater into the stencil membrane.

Main Results:

  • Achieved sub-micrometre patterning with unique features like width-modulated height and variable-period gratings.
  • Confirmed the limitation of aperture clogging due to material accretion in sub-micrometre DSL.
  • Successfully demonstrated the effectiveness of the embedded micro-heater in preventing aperture clogging.
  • Extended the active lifetime of stencil apertures in dynamic mode.

Conclusions:

  • Dynamic stencil lithography is a versatile technique for sub-micrometre patterning.
  • Aperture clogging is a significant challenge for sub-micrometre DSL.
  • The novel micro-heater solution effectively mitigates aperture clogging, improving the technique's practicality.
  • This advancement broadens the applicability of DSL for micro- and nanofabrication.