Probing near-surface nanoscale mechanical properties of low modulus materials using a quartz crystal resonator atomic...

We describe the development of a technique for making indentations on the top 5-20 nm of the surfaces of relatively low modulus materials using a high spatial and force sensitivity atomic force microscope (AFM) whose optical cantilever has been replaced by a quartz crystal resonator (QCR). Unlike conventional optical-cantilever-based AFMs, the accuracy of this technique is not compromised by the compliance of the loading system due to the high stiffness of the QCR. To obtain material modulus values from the indentation results, we find the commonly used Oliver-Pharr model to be unsuitable because of our use of a sharp tip and relatively deep indentation. Instead, we develop a new analysis that may be more appropriate for the geometry we use as well as the non-linear constitutive behavior exhibited by the materials we examined. We calculated values for the moduli of several different materials, which we find to be consistent with the range of published data.