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Updated: May 31, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
Published on: October 11, 2016
Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry
Yucong Zhu1, Satoru Odate, Ayako Sugaya
1Core Technology Center, Nikon Corporation, 6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan. zhu.yucong@nikon.co.jp
Abstract:
We propose a design method of phase-analysis algorithms based on two-dimensional grating phase shifting for Talbot interferometry, Talbot-Lau imaging, or the Ronchi test. These algorithms are designed to separate the two orthogonal shearing wavefronts and eliminate error effects of unwanted diffraction orders, simultaneously. Taking the effect of multidiffraction into account, moving the two-dimensional grating along a certain pass leads to a series of phase-shifted interfrograms, from which two orthogonal shearing wavefronts are derived, for the tested wavefront to be retrieved. The designing process is demonstrated, and the residual errors are analyzed via simulation works and experimental comparison.
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