Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry

Yucong Zhu1, Satoru Odate, Ayako Sugaya

  • 1Core Technology Center, Nikon Corporation, 6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan. zhu.yucong@nikon.co.jp

Applied Optics
|June 22, 2011
PubMed