FIB-SEM cathodoluminescence tomography: practical and theoretical considerations
D A M De Winter1, M N Lebbink, D F Wiggers De Vries
1Biomolecular Imaging, Faculty of Sciences, Utrecht University, NL-3584 CH Utrecht, The Netherlands.
Journal of Microscopy
|June 23, 2011
Summary
Focused ion beam-scanning electron microscope (FIB-SEM) tomography combined with cathodoluminescence (CL) imaging shows potential for 3D material analysis. Ion milling influences CL emission, but specific conditions enhance it, improving image quality for FIB-SEM CL tomography.
Area of Science:
- Materials Science
- Analytical Chemistry
- Geoscience
Background:
- Focused ion beam-scanning electron microscope (FIB-SEM) tomography is crucial for 3D material characterization.
- Cathodoluminescence (CL) imaging reveals defect and impurity variations within materials.
- Combining FIB-SEM and CL offers advanced 3D analytical possibilities.
Purpose of the Study:
- To assess the feasibility of integrating FIB-SEM tomography with CL imaging.
- To investigate the influence of ion milling on CL emission in natural diamond.
- To develop protocols for FIB-SEM CL tomography.
Main Methods:
- Systematic investigation of ion beam and electron beam acceleration voltage effects on CL emission.
- Utilizing a novel specimen geometry for sequential ion milling and CL imaging on untilted samples.
- Manual combination of CL imaging with FIB-SEM tomography for 3D reconstruction.
Main Results:
- Ion milling influences diamond's CL emission, with enhancement observed at low ion and electron beam voltages.
- Enhanced CL emission, partly due to surface defects from ion milling, can improve image quality.
- A modified protocol enabled manual FIB-SEM CL tomography with a novel specimen geometry.
Conclusions:
- FIB-SEM CL tomography is feasible, with potential for automation using dedicated CL detectors.
- The resolution of FIB-SEM CL tomography is currently limited to hundreds of nm (XY) and up to 650 nm (Z) for diamonds.
- Improved Z resolution may be achievable for opaque materials.
Related Concept Videos
01:25Imaging Studies II: Positron Emission Tomography and Scintigraphy
Positron Emission Tomography (PET) is a medical imaging technique that provides crucial insights into the body's physiological functions at a molecular level. It is an indispensable resource for diagnosing, staging, and monitoring various illnesses, notably cancer, neurological disorders, and cardiovascular conditions.
Fundamental Principles of PET
Fundamental Principles of PET
01:10Computed Tomography
Tomography refers to imaging by sections. Computed tomography (CT) is a non-invasive imaging technique that uses computers to analyze several cross-sectional X-rays to reveal minute details about structures in the body.
The technique was invented in the 1970s and is based on the principle that as X-rays pass through the body, they are absorbed or reflected at different levels. In the technique, a patient lies on a motorized platform while a computerized axial tomography (CAT) scanner rotates...
The technique was invented in the 1970s and is based on the principle that as X-rays pass through the body, they are absorbed or reflected at different levels. In the technique, a patient lies on a motorized platform while a computerized axial tomography (CAT) scanner rotates...