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Updated: May 31, 2026

Atomically Traceable Nanostructure Fabrication
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Surface nanostructures by single highly charged ions.

S Facsko1, R Heller, A S El-Said

  • 1Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Dresden-Rossendorf, D-01328 Dresden, Germany.

Journal of Physics. Condensed Matter : an Institute of Physics Journal
|July 1, 2011
PubMed
Summary

Impacts of slow, highly charged ions create nanometer-scale surface modifications. The size of these features, like blisters and craters, primarily depends on ion potential energy, not kinetic energy.

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Area of Science:

  • Surface science
  • Materials science
  • Ion-surface interactions

Background:

  • Highly charged ions (HCIs) can induce significant surface modifications.
  • Observed phenomena include blisters, hillocks, craters, and pits on various materials.
  • Previous studies suggest a correlation between ion properties and modification characteristics.

Purpose of the Study:

  • To review experimental evidence on nanosized surface modifications induced by slow HCIs.
  • To present theoretical models explaining these phenomena.
  • To discuss conditions favoring the production of nanofeatures.

Main Methods:

  • Review of existing experimental data on ion-surface impacts.
  • Analysis of theoretical models describing ion-induced sputtering and defect formation.

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Published on: June 16, 2014

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Last Updated: May 31, 2026

Atomically Traceable Nanostructure Fabrication
12:35

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Published on: July 17, 2015

In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
10:22

In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions

Published on: June 16, 2014

  • Comparison of modification sizes across different materials and ion energies.

    • Main Results:

    • Nanosized surface modifications are reliably produced by slow HCIs.
    • Modification size scales strongly with the potential energy of the ion.
    • Kinetic energy of the ion has a negligible effect on the resulting nanostructure.

    Conclusions:

    • Slow, highly charged ion impacts are a viable method for creating nanometer-scale surface features.
    • Potential energy is the key parameter governing the extent of surface modification.
    • Understanding these interactions is crucial for controlled nanomaterial fabrication.