A method to quantitatively measure the elastic modulus of materials in nanometer scale using atomic force microscopy.

B Tang1, A H W Ngan, J B Pethica

  • 1Department of Mechanical Engineering, University of Hong Kong, Pokfulam Road, Hong Kong 999077, People's Republic of China.

Nanotechnology
|July 7, 2011
PubMed
Summary

A new atomic force microscopy (AFM) nanoindentation method accurately measures material elastic modulus. This technique calibrates the AFM tip and sensitivity using reference materials for precise measurements.