Projected thickness reconstruction from a single defocused transmission electron microscope image of an amorphous

A C Y Liu1, D M Paganin, L Bourgeois

  • 1School of Physics, Monash University, Victoria 3800, Australia. amelia.liu@sci.monash.edu.au

Ultramicroscopy
|July 9, 2011
PubMed
Summary

This study introduces a new algorithm for reconstructing material thickness from a single defocused electron microscope image. The method is non-iterative and accounts for spherical aberration in the optics. It works for single-material objects and detects thickness variations as small as 0.25 nm. The algorithm is stable even with noise and input errors. Simulations and real data confirm its accuracy. Autocorrelation analysis reveals open structures in the material. The technique is ideal for studying voids in amorphous materials at the nanometer scale.

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