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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Single-shot, dual-wavelength digital holography based on polarizing separation
D G Abdelsalam1, Robert Magnusson, Daesuk Kim
1Division of Mechanical System Engineering, Chonbuk National University, Jeonju 561-756, South Korea.
Applied Optics
|July 12, 2011
Summary
A new digital holographic setup enables single-shot, dual-wavelength measurements and imaging polarimetry. This advanced technique effectively suppresses noise for accurate 3D object analysis and fast polarization imaging.
Area of Science:
- Optics and Photonics
- Metrology
- Digital Holography
Background:
- Digital holographic microscopy is crucial for 3D surface profiling.
- Existing methods often require multiple acquisitions or struggle with abrupt height differences.
- Polarization imaging provides valuable information about material properties.
Purpose of the Study:
- To introduce a novel digital holographic configuration.
- To demonstrate its capability for single-shot, dual-wavelength, off-axis geometry.
- To showcase its application in imaging polarimetry.
Main Methods:
- A modified flat fielding method was employed to suppress noise in dual-wavelength measurements.
- Experiments were conducted using a sample with a 1.34 μm step height.
- Imaging polarimetry was demonstrated on a nanopattern sample using single image acquisition.
Main Results:
- The proposed configuration successfully suppressed measurement noise.
- Feasibility of single-shot, dual-wavelength, off-axis geometry was confirmed.
- Imaging polarimetry capabilities were successfully demonstrated.
Conclusions:
- The new digital holographic configuration offers a real-time solution for measuring 3D objects with high, abrupt height differences.
- It serves as a fast tool for polarization imaging measurements.
- This technique enhances precision and speed in metrology applications.
