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Implementation of a Reference Interferometer for Nanodetection
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Published on: April 26, 2014

Reference surface calibration of a Fizeau interferometer through even/odd synthesis.

Weibo Wang1, Jiubin Tan, Tong Wang

  • 1Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China.

Applied Optics
|July 12, 2011
PubMed
Summary

This study introduces an even-/odd-synthesis method to precisely calibrate Fizeau interferometer reference surfaces (RS). This technique eliminates aberrations from misalignment and vibration, improving measurement accuracy.

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Area of Science:

  • Optical Engineering
  • Metrology
  • Interferometry

Background:

  • Fizeau interferometers are crucial for precise surface metrology.
  • Misalignment and environmental vibrations introduce aberrations during reference surface calibration.
  • Accurate calibration of reference surfaces is essential for reliable optical measurements.

Purpose of the Study:

  • To develop a novel method for eliminating calibration aberrations in Fizeau interferometers.
  • To enhance the accuracy and repeatability of reference surface measurements.
  • To provide a robust calibration technique for optical components.

Main Methods:

  • An even-/odd-synthesis method is proposed, separating surface errors into rotationally symmetric and nonrotationally symmetric components.
  • A least-squares algorithm with dual-objective optimization is employed for calibration at the confocal position.
  • The odd and even parts of the reference surface are synthesized to reconstruct a complete surface map.

Main Results:

  • The method successfully eliminates additional aberrations caused by misalignment and environmental vibration.
  • Experimental verification shows measurement repeatability for the PV value better than 0.003λ.
  • The root-mean-square (RMS) value repeatability is demonstrated to be better than 0.0003λ.

Conclusions:

  • The even-/odd-synthesis method offers a significant improvement in Fizeau interferometer reference surface calibration.
  • The proposed technique achieves high measurement accuracy and repeatability.
  • This method is vital for precise optical metrology applications.