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Published on: February 5, 2017
Corrugated carbon nanotube microstructures with geometrically tunable compliance
Michaël F L De Volder1, Sameh Tawfick, Sei Jin Park
1Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109, USA. michael.devolder@imec.be
ACS Nano
|August 2, 2011
Summary
Researchers developed a scalable method for fabricating 3D corrugated carbon nanotube (CNT) microstructures. These novel microsprings offer tunable compliance for advanced material applications.
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- Precise arrangement of nanostructures into microscale designs is crucial for creating materials with unique properties.
- Carbon nanotubes (CNTs) offer exceptional mechanical and electrical characteristics, making them promising building blocks for advanced materials.
Purpose of the Study:
- To demonstrate a scalable fabrication technique for 3D corrugated carbon nanotube (CNT) microstructures.
- To explore the potential of these microstructures as tunable out-of-plane microsprings.
Main Methods:
- Utilized an iterative process combining vertically aligned CNT growth and capillary self-assembly.
- Fabricated microstructures with thin walls and high aspect ratios exceeding 100:1 over large areas.
Main Results:
- Successfully created 3D corrugated CNT microstructures, including vertical microbellows and tilted microcantilevers.
- Demonstrated the tunable compliance of these structures as out-of-plane microsprings, dependent on wall thickness and fold count.
Conclusions:
- The developed method provides a scalable route to complex 3D nanostructured materials.
- The fabricated CNT microsprings show potential for applications requiring precise mechanical responses at the microscale.

