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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Simple characterisation of a deformable mirror inside a high numerical aperture microscope using phase diversity.
D Débarre1, T Vieille, E Beaurepaire
1Laboratory for Optics and Biosciences, Ecole Polytechnique ParisTech, CNRS, and INSERM, Palaiseau, France. delphine.debarre@polytechnique.edu
Journal of Microscopy
|August 2, 2011
Summary
We developed a simple method to measure how deformable mirrors affect light in microscopes. This technique accurately characterizes mirror performance for advanced imaging without complex setups.
Area of Science:
- Microscopy
- Optical Physics
- Wavefront Sensing
Background:
- Characterizing optical elements like deformable mirrors is crucial for advanced microscopy.
- Existing wavefront sensing methods can be complex and require setup modifications.
Purpose of the Study:
- To present a simple and versatile scheme for characterizing amplitude and phase modulation by active elements in a high numerical aperture (NA) microscope pupil plane.
- To enable accurate measurement of deformable mirror influence functions.
Main Methods:
- A mirror was placed near the objective's focal plane to record reflected focal spot images.
- An iterative electric field retrieval algorithm was used to obtain mirror influence functions.
- The method was validated by comparing results with a Shack-Hartmann wavefront sensor.
Main Results:
- Reliable measurements of mirror actuator influence functions in the pupil plane were obtained.
- The proposed method achieved comparable precision to a Shack-Hartmann sensor.
- The technique demonstrated versatility across different objectives and compatibility with pulsed sources.
Conclusions:
- The presented scheme offers a simple, versatile, and space-efficient method for characterizing active optical elements in microscopy.
- It provides a valuable alternative to direct wavefront sensors, especially for multiphoton microscopy and various objective types.

