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Updated: May 30, 2026
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond
Stefan M Weber1, Luigi Bonacina, Wilfried Noell
1GAP-Biophotonics, Université de Genève, 20 rue de l'Ecole de Médecine, 1211 Genève 4, Switzerland.
Abstract:
We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.
