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Updated: May 30, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
12:38

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

Published on: December 16, 2011

Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon

Aleksandr Kravchenko1, Andriy Shevchenko, Victor Ovchinnikov

  • 1Department of Applied Physics, Aalto University, Finland.

Advanced Materials (Deerfield Beach, Fla.)
|August 9, 2011
PubMed
Abstract

No abstract available in PubMed .

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