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Updated: May 30, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Published on: February 12, 2017

4000 holes

Jeremy R H Tame¹

¹jtame@tsurumi.yokohama-cu.ac.jp

Journal of Molecular Biology

|August 11, 2011

Summary

No abstract available in PubMed .

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