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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
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CMOS considerations in nanoelectromechanical carbon nanotube-based switches

M Y A Yousif1, P Lundgren, F Ghavanini

  • 1Micro- and Nanosystems Group, BioNano Systems Laboratory, Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, SE-412 96 Gothenburg, Sweden.

Nanotechnology
|August 11, 2011
PubMed

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