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Updated: May 30, 2026

Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
Published on: July 2, 2012
Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform
S Krishnamoorthy1, Y Gerbig, C Hibert
1Centre Suisse d'Electronique et de Microtechnique SA, Jaquet Droz 1, CH-2007 Neuchâtel, Switzerland.
Abstract:
We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, silicon oxide, silicon nitride and quartz. The promise of the approach as a versatile application oriented platform is highlighted by demonstrating its utility for creating super-hydrophobic surfaces, fabrication of nanoporous polymeric membranes, and controlling the areal density of physical vapor deposition derived titanium nitride nanostructures.

