Potential-induced copper periodic micro-/nanostructures by electrodeposition on silicon substrate
Related Experiment Video
Updated: May 30, 2026

Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
Published on: July 2, 2012
Zhaocun Zong1, Hai Yu, Lianping Nui
1National Laboratory of Superhard Materials and Institute of Atomic and Molecular Physics, Jilin University, Changchun 130012, People's Republic of China.
Abstract:
We demonstrate the fabrication of large scale nano- and micropatterned copper periodic structures on a silicon substrate without imposed templates. In the electrodeposition process, we employ a periodic variation voltage in an ultrathin layer of concentrated CuSO(4) electrolyte. The pattern can be controlled by varying the frequency of the applied potential. We suggest that the observed periodic micro-/nanostructures are caused by the lag of the migrating ion concentration profile versus the applied voltage profile near the tip of the growth.

