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Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable
1Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, Taiwan, Republic of China.
Abstract:
In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to -15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.
