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Updated: May 30, 2026

Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
Molecular beam epitaxy growth methods of wavelength control for InAs/(In)GaAsN/GaAs heterostructures
V V Mamutin1, A Yu Egorov, N V Kryzhanovskaya
1Ioffe Physical Technical Institute, 26 Politechnicheskaya, St Petersburg 194021, Russia.
Abstract:
We discuss the molecular beam epitaxy (MBE) growth methods of emission wavelength control and property investigations for different types of InAs/(In)GaAsN/GaAs heterostructures containing InGaAsN quantum-size layers: (1) InGaAsN quantum wells deposited by the conventional mode in a GaAs matrix, (2) InAs quantum dots deposited in a GaAsN matrix or covered by an InGaAs(N) layer, and (3) InAs/InGaAsN/GaAsN strain-compensated superlattices with quantum wells and quantum dots. The structures under investigation have demonstrated photoluminescence emission in a wavelength range of ∼1.3-1.8 µm at room temperature without essential deterioration of the radiative properties.

