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Updated: May 30, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Vertically aligned carbon nanotube electrodes directly grown on a glassy carbon electrode
Serin Park1, Dong-Won Park, Cheol-Soo Yang
1NanoBio Fusion Research Center, Korea Research Institute of Chemical Technology, Sinseongno 19, Yuseong-gu, Daejeon 305-343, Korea.
Abstract:
Three-dimensional microelectrodes were fabricated using glassy carbon electrodes combined with vertically aligned carbon nanotubes (VACNTs). VACNTs were grown on various conducting electrode patterns including a carbon electrode fabricated by pyrolysis of a negative photoresist, with plasma-enhanced chemical vapor deposition using a bilayer Fe/Al catalyst. VACNT electrodes grown on the glassy carbon showed excellent electrochemical behavior, whereas VACNT electrodes grown on Pt showed poor electrochemical performance, presumably due to the poor contact between VACNTs and the Pt electrode. Electron microscopy showed that the VACNT layer was strongly bound to the carbon electrode, while that on Pt tended to peel away. The versatility of the all-carbon microelectrodes was also tested by using them for interfacing stem cells. Their superior mechanical properties and the electrical connectivity between the carbon electrode and the VACNTs, along with the simple fabrication process, suggest that glassy carbon may be a good conducting substrate for VACNT electrodes.
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