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Updated: May 30, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Two-dimensional guided mode resonance filters fabricated in a uniform low-index material system
Aaron J Pung1, Menelaos K Poutous, Raymond C Rumpf
1Micro-Photonics Laboratory, Center for Optoelectronics and Optical Communications, 9201 University City Boulevard, University of North Carolina at Charlotte, Charlotte, North Carolina, 28223, USA.
Abstract:
We demonstrate the fabrication, simulation, and experimental results of a buried, homogeneous narrowband spectral filter with a periodic, hexagonal unit cell of air pockets, encapsulated in a fused silica substrate. The leaky waveguide is formed by depositing SiO(x) on an etched fused silica grating via plasma-enhanced chemical vapor deposition. Design principles of guided mode resonance filters were utilized to achieve a resonance with 60% reflectivity at a wavelength of 1.741 μm. The device demonstrates resonance with FWHM of 6 nm.
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