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Related Experiment Video

Updated: May 30, 2026

Polymeric Microneedle Array Fabrication by Photolithography
08:15

Polymeric Microneedle Array Fabrication by Photolithography

Published on: November 17, 2015

Sequential shrink photolithography for plastic microlens arrays.

David Dyer1, Samir Shreim, Shreshta Jayadev

  • 1Department of Biomedical Engineering, University of California, Irvine, Irvine 92697, California, USA.

Applied Physics Letters
|August 25, 2011
PubMed
Summary

We developed a sequential shrink photolithography process to create plastic microlens arrays. This method uses shrinkable polymers for efficient, high-resolution microfabrication of optical components.

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Area of Science:

  • Materials Science
  • Optical Engineering
  • Microfabrication

Background:

  • Advanced microfabrication techniques are crucial for developing novel optical components.
  • Shrinkable polymers offer unique properties for miniaturization and pattern transfer.
  • Existing methods for creating plastic microlenses can be complex and costly.

Purpose of the Study:

  • To develop a novel, cost-effective, and efficient method for fabricating plastic microlens arrays.
  • To demonstrate the utility of sequential shrink photolithography using readily available materials.
  • To achieve high-resolution micro-optical components through controlled polymer shrinkage.

Main Methods:

  • A mask was created using Shrinky Dinks, a printable thermoplastic, by printing dots.

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  • The mask's pre-stressed thermoplastic sheet was shrunk, and the pattern was lithographically transferred to photoresist-coated shrink wrap film.
  • The shrink film was heated, causing a 95% area reduction and forming smooth convex photoresist bumps down to 30 µm.
  • A lithography molding step embossed these bumps into optical-grade plastics like cyclic olefin copolymer.

    • Main Results:

    • A sequential shrink photolithography process was successfully developed.
    • Plastic microlens arrays were rapidly fabricated with an almost 99% reduction in area from the original pattern size.
    • Smooth convex photoresist bumps as small as 30 µm were created.
    • Functional microlens arrays were embossed into optical-grade plastics.

    Conclusions:

    • Sequential shrink photolithography is a viable and efficient method for producing plastic microlens arrays.
    • This technique offers a significant reduction in feature size and a cost-effective approach to microfabrication.
    • The developed process enables the creation of high-quality optical components for various applications.