Humidity response properties of a potentiometric sensor using LaF3 thin film as the solid electrolyte
Guoliang Sun1, Hairong Wang, Zhuangde Jiang
1State Key Laboratory for Manufacturing Systems Engineering, Xi'an, Shaanxi, People's Republic of China.
Abstract:
A thin-film type potentiometric sensor has been prepared by the implementation of electro-beam evaporation, rf magnetron sputtering methods, and micromachining processes. Sn film was deposited on n-Si/SiO(2) (400 nm) substrate. A deposited LaF(3) film was applied as solid electrolyte and sputtered Pt film was used as the sensing electrode. The patterns of the Pt and LaF(3) were realized by the micromachining processes. The LaF(3) film was characterized by scanning electron microscopy and energy dispersive x ray. Saturated aqueous solutions were used to achieve controlled humidity environments. When the sensor was exposed to humidity environments, the electromotive force (EMF) of the sensor was examined. It was found that the sensor varies with the relative humidity (RH). The stable response curve was presented and non-Nernst behavior between the average EMF values and RH may be shown.
More Related Videos
Related Concept Videos
Potentiometry: Membrane Electrodes
Potentiometry: Types of Electrodes
The Standard Hydrogen Electrode (SHE) is a widely used reference electrode that maintains zero potential across all temperatures. However, its need for a continuous hydrogen gas supply renders it impractical for everyday use.
An alternative to SHE is the Saturated Calomel Electrode (SCE). This electrode features an...
Potentiometry: Overview
Controlled-Potential Coulometry: Electrolytic Methods
The chosen potential ensures...
Precipitation of Ions
The equation that describes the equilibrium between solid calcium carbonate and its solvated ions is:
Electrodes: Overview
There are two main types of electrodes in electrochemical cells. The first type, known as the working or indicator electrode, has a potential that is sensitive to the analyte's concentration and reacts to changes in the...


