Note: Two-dimensional resistivity mapping method for characterization of thin films and nanomaterials

Jin-Woo Han1, Beomseok Kim, Yun Chang Park

  • 1Center for Nanotechnology, NASA Ames Research Center, Moffett Field, California 94035, USA. jin-woo.han@nasa.gov

Summary

This study introduces a novel 2D resistivity mapping technique for analyzing thin films. The method reconstructs internal resistivity distribution using peripheral measurements, proving effective for both uniform and non-uniform films.