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Patterning via Optical Saturable Transitions - Fabrication and Characterization

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A portable, benchtop photolithography system based on a solid-state light source

Mark D Huntington¹, Teri W Odom

¹Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA.

Small (Weinheim an Der Bergstrasse, Germany)

|September 9, 2011

Summary

No abstract available in PubMed .

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