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Updated: May 29, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
High resolution (NA = 0.8) in lensless in-line holographic microscopy with glass sample carriers
Mario Kanka1, Rainer Riesenberg, Paul Petruck
1Institute of Photonic Technology, Jena, Germany. mario.kanka@ipht‐jena.de
Abstract:
For lensless digital in-line holographic microscopy a new state-of-the-art spatial resolution corresponding to an NA of 0.8 is shown based on the tile superposition propagation. The result is proved using a common glass sample carrier with a refraction index of 1.52. Single-shot high-resolution imaging is possible by suppression of coherent reflections in an optimized arrangement using partially coherent laser light illumination.
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