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Updated: May 29, 2026

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Published on: September 8, 2017
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses
Hanfei Yan1, Volker Rose, Deming Shu
1Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA.
Abstract:
Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm(2) FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm(2) FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.
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