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Updated: May 28, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Aerosol assisted fabrication of two dimensional ZnO island arrays and honeycomb patterns with identical lattice
Mitsuhiro Numata1, Yoshihiro Koide
1Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University, 3-27-1 Rokkakubashi, Yokohama, Kanagawa-ku, Kanagawa 221-8686 Japan; Fax +81-45-413-9770, Tel +81-45-481-5661.
Abstract:
Two dimensional island arrays and honeycomb patterns consisting of ZnO nanocrystal clusters were fabricated on predefined TiO(2) seed patterns prepared by vacuum free, aerosol assisted wet-chemical synthesis. The TiO(2) seed patterns were prepared by applying an aerosol of a water soluble titanium complex on hexagonally close-packed polystyrene bead arrays for different lengths of time. Scanning electron microscopy revealed that a dot array grows into a honeycomb shape as increasing amounts of the precursor were deposited. ZnO nucleation on substrates with a dot array and honeycomb patterns resulted in the formation of two discrete patterns with contrasting fill fractions of the materials.

