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Updated: May 28, 2026

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings

A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings

Published on: September 30, 2019

MEMS Bragg grating force sensor.

Kasper Reck¹, Erik V Thomsen, Ole Hansen

¹Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, DK-2800 Kongens Lyngby, Denmark. kasper.reck@nanotech.dtu.dk

|October 15, 2011

Summary

This summary is machine-generated.

We developed a novel all-optical microelectromechanical systems (MEMS) force sensor. This sensor offers significantly higher sensitivity for measurements in challenging environments compared to traditional methods.

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Area of Science:

Optoelectronics
Microelectromechanical Systems (MEMS)
Nanophotonics

Background:

Conventional fiber Bragg grating sensors have limitations in sensitivity and application scope.
Harsh environments and remote sensing require robust and highly sensitive force measurement tools.

Purpose of the Study:

To introduce a novel all-optical frequency modulated MEMS force sensor.
To enhance sensitivity and applicability for force measurements in demanding conditions.

Main Methods:

Modeling, design, and fabrication of a double clamped waveguide beam structure.
Integration of a Bragg grating for optical frequency modulation.
Characterization of sensor performance and sensitivity.

Main Results:

Demonstrated a new type of all-optical frequency modulated MEMS force sensor.
Achieved a measured sensitivity of -14 nm/N.
The sensor shows suitability for harsh environments and distributed sensing.

Conclusions:

The developed MEMS force sensor provides a significant improvement in sensitivity over conventional approaches.
This technology is well-suited for advanced force sensing applications in challenging settings.