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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

CMOS compatible reconfigurable filter for high bandwidth non-blocking operation.

Hugo L R Lira1, Carl B Poitras, Michal Lipson

  • 1School of Electrical and Computer Engineering, Cornell University, Ithaca, N.Y. 14853, USA.

Optics Express
|October 15, 2011
PubMed
Summary
This summary is machine-generated.

We developed a new silicon microring resonator filter that is CMOS-compatible and offers a large Free Spectral Range (FSR). This filter allows for non-blocking reconfiguration, enhancing optical network performance.

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Area of Science:

  • Photonics and Optical Engineering
  • Integrated Optics
  • Semiconductor Devices

Background:

  • Microring resonator filters are crucial components in optical communication networks.
  • Achieving a large Free Spectral Range (FSR) is essential for dense wavelength-division multiplexing (DWDM) systems.
  • Reconfigurable optical filters are needed for flexible network management.

Purpose of the Study:

  • To design, fabricate, and characterize a novel CMOS-compatible microring resonator filter.
  • To achieve a large FSR using microring resonators.
  • To demonstrate non-blocking thermo-optical filter reconfiguration.

Main Methods:

  • Utilized silicon microring resonators with a 10-μm radius.
  • Employed a Mach-Zehnder interferometer configuration.
  • Implemented thermo-optical tuning for filter reconfiguration.

Main Results:

  • Successfully fabricated a CMOS-compatible microring resonator filter.
  • Achieved an FSR equivalent to that of 5-μm radius microrings, indicating a large FSR.
  • Demonstrated non-blocking filter reconfiguration over an 8.5 nm range.

Conclusions:

  • The developed microring resonator filter offers a large FSR and non-blocking reconfigurability.
  • CMOS compatibility facilitates integration into existing fabrication processes.
  • This technology enables more flexible and efficient optical networks.