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Double drive modes unimorph deformable mirror for low-cost adaptive optics
Jianqiang Ma1, Ying Liu, Ting He
1Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China.
Applied Optics
|October 22, 2011
Summary
This study presents a low-cost deformable mirror (DM) for aberration correction. The developed thin unimorph mirror achieves precise surface deformations, proving effective for low-order optical aberrations.
Area of Science:
- Optics and Photonics
- Adaptive Optics
- MEMS Technology
Background:
- Deformable mirrors (DMs) are crucial components in adaptive optics systems for correcting wavefront aberrations.
- Existing DMs can be costly and complex, necessitating the development of more accessible solutions.
Purpose of the Study:
- To develop and characterize a low-cost, thin unimorph deformable mirror (DM) driven by positive voltage.
- To investigate the DM's performance for aberration correction and defocus bias generation.
Main Methods:
- Fabrication of a thin unimorph DM with an inner actuator array for aberration correction and an outer ring actuator for defocus bias.
- Utilizing an analytical model based on plate and shell theory to predict DM behavior.
- Experimental characterization of deformation capabilities, resonant frequency, and surface accuracy.
Main Results:
- The DM demonstrated maximum defocus deformations of -14.3 μm and 14.9 μm.
- A resonant frequency of 1.8 kHz was measured.
- The root-mean-square deformation after correction was better than λ/20 for λ=633 nm.
- Accurate replication of Zernike modes up to the fifth order was achieved.
Conclusions:
- The developed low-cost deformable mirror is suitable for low-order aberration correction.
- The dual-actuator design allows for both precise aberration correction and overall defocus adjustment.
- This technology offers a cost-effective solution for adaptive optics applications.

