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Related Experiment Video

Updated: May 28, 2026

Preparation of Janus Particles and Alternating Current Electrokinetic Measurements with a Rapidly Fabricated Indium Tin Oxide Electrode Array
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Iridium wire grid polarizer fabricated using atomic layer deposition.

Thomas Weber1, Thomas Käsebier, Adriana Szeghalmi

  • 1Friedrich-Schiller-University Jena, Institute of Applied Physics, Max-Wien-Platz 1, 07749 Jena, Germany. th.weber@uni-jena.de.

Nanoscale Research Letters
|October 26, 2011
PubMed
Summary

This study presents an iridium wire grid polarizer fabricated using ultrafast electron beam lithography and atomic layer deposition for UV applications. The novel method achieves high transmission and extinction ratios, crucial for frequency doubling processes.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Nanotechnology

Background:

  • Ultraviolet (UV) applications require efficient polarizers.
  • Existing fabrication methods have limitations in precision and material choice.
  • Iridium offers excellent optical properties and oxidation resistance for demanding applications.

Purpose of the Study:

  • To develop an effective multistep process for fabricating an iridium wire grid polarizer.
  • To enable UV applications, specifically frequency doubling processes.
  • To leverage advanced fabrication techniques for precise grating structures.

Main Methods:

  • Utilized ultrafast electron beam lithography for high-resolution patterning.
  • Employed atomic layer deposition for precise iridium film growth.

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Last Updated: May 28, 2026

Preparation of Janus Particles and Alternating Current Electrokinetic Measurements with a Rapidly Fabricated Indium Tin Oxide Electrode Array
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  • Fabricated an iridium wire grid structure optimized for UV wavelengths.

    • Main Results:

    • Achieved a transmission of approximately 45% at 250 nm.
    • Obtained an extinction ratio of 87 for the iridium wire grid polarizer.
    • Demonstrated the effectiveness of atomic layer deposition for precise grating parameter control.

    Conclusions:

    • The presented multistep fabrication process is effective for creating high-performance iridium wire grid polarizers.
    • The developed polarizer is suitable for UV applications, including frequency doubling.
    • Atomic layer deposition offers superior control over structural parameters compared to other techniques.