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Updated: May 28, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

Universal nanopatternable interfacial bonding.

Yuzhe Ding¹, Shaun Garland, Michael Howland

¹Micro-Nano Innovations Laboratory, Department of Biomedical Engineering, University of California Davis, 95616, USA.

Advanced Materials (Deerfield Beach, Fla.)

|October 27, 2011

Summary

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A novel nanopatternable polydimethylsiloxane (PDMS) oligomer layer acts as a universal interfacial adhesive. This PDMS layer enables strong, irreversible bonding between diverse materials like metals, ceramics, and polymers.

Area of Science:

Materials Science
Surface Chemistry
Adhesion Science

Background:

Achieving robust and universal adhesion between dissimilar materials remains a significant challenge in various engineering applications.
Polydimethylsiloxane (PDMS) is widely used but often requires specific surface treatments for strong bonding.

Purpose of the Study:

To develop a nanopatternable polydimethylsiloxane (PDMS) oligomer layer that functions as a universal interfacial adhesive.
To demonstrate the intrinsic transferability and universal adhesiveness of this PDMS layer for irreversible bonding.

Main Methods:

Utilizing well-established surface modification and bonding techniques applicable to PDMS surfaces.
Fabricating and testing nanopatternable PDMS oligomer layers as interfacial adhesives.

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Last Updated: May 28, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

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Published on: January 9, 2014

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PDMS Device Fabrication and Surface Modification

PDMS Device Fabrication and Surface Modification

Published on: October 1, 2007

Investigating bonding strength between various substrate pairs including metals, ceramics, thermoset, and thermoplastic polymers.

Main Results:

Demonstrated a nanopatternable PDMS oligomer layer with intrinsic transferability and universal adhesiveness.
Achieved irreversible bonding with strengths up to 400 kPa between diverse material pairs.
Successfully bonded substrates across different material categories, including metals, ceramics, and various polymers.

Conclusions:

The developed nanopatternable PDMS oligomer layer serves as an effective universal interfacial adhesive.
This approach enables strong and irreversible bonding for a wide range of material combinations, overcoming previous limitations.
The intrinsic properties of the PDMS layer simplify bonding processes and expand material joining possibilities.