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Generation of extreme ultraviolet vortex beams using computer generated holograms.

Bernd Terhalle1, Andreas Langner, Birgit Päivänranta

  • 1Laboratory for Micro- and Nanotechnology, Paul Scherrer Institute, CH-5232 Villigen PSI, Switzerland. bernd.terhalle@psi.ch

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We created computer-generated holograms to produce phase singularities and optical vortices at extreme ultraviolet (EUV) wavelengths. This method enables new studies of singular light fields in EUV interference lithography and X-ray optics.

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Area of Science:

  • Optics and Photonics
  • Nanotechnology
  • Quantum Optics

Background:

  • Phase singularities are crucial for understanding light-matter interactions.
  • Extreme ultraviolet (EUV) light offers unique properties for high-resolution applications.
  • Generating and controlling singular light fields in the EUV spectrum is challenging.

Purpose of the Study:

  • To fabricate computer-generated holograms for generating phase singularities at EUV wavelengths.
  • To demonstrate the generation of optical vortices in nonzero diffraction orders using these holograms.
  • To establish a foundation for advanced research in EUV singular light fields and applications.

Main Methods:

  • Fabrication of computer-generated holograms via electron beam lithography.
  • Generation of optical vortices in nonzero diffraction orders.
  • Interferometric verification of helical phase structure.
  • Observation of characteristic vortex beam intensity distribution.

Main Results:

  • Successfully generated phase singularities and optical vortices at EUV wavelengths.
  • Demonstrated control over vortex beam properties in nonzero diffraction orders.
  • Verified the helical phase structure of the generated beams.

Conclusions:

  • The presented holographic method is effective for generating singular light fields in the EUV.
  • This technique is suitable for EUV interference lithography.
  • The achromatic nature of the method suggests potential applications in X-ray optics.