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Updated: May 27, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
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Microfabricated optofluidic ring resonator structures.

Kee Scholten, Xudong Fan, Edward T Zellers

    Applied Physics Letters
    |November 5, 2011
    PubMed
    Summary
    This summary is machine-generated.

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    We developed new silicon micromachined optofluidic ring resonators (μOFRR) for enhanced light confinement. These devices show high performance for potential use in vapor detection systems.

    Area of Science:

    • Optofluidics
    • Nanophotonics
    • Materials Science

    Background:

    • Whispering gallery modes (WGMs) are sensitive to their environment, making them ideal for sensing.
    • Optofluidic ring resonators (OFRRs) integrate optical cavities with microfluidic channels for advanced applications.
    • Enhancing the three-dimensional confinement of WGMs is crucial for improving sensor performance.

    Purpose of the Study:

    • To fabricate and optically characterize novel silicon-micromachined optofluidic ring resonator (μOFRR) structures.
    • To improve the three-dimensional confinement of whispering gallery modes (WGMs) within the resonators.
    • To assess the potential of these μOFRRs for vapor detection in gas chromatographic microsystems.

    Main Methods:

    • Fabrication of μOFRR structures using silicon micromachining and thermal growth of SiO(x) cylinders.

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  • Wafer-scale fabrication on deep-reactive-ion etched silicon molds with pre-treated surfaces to minimize roughness.
  • Optical characterization of the fabricated devices, measuring Q-factors and mode properties near 985 nm.

    • Main Results:

    • Successfully fabricated rugged, thin-walled SiO(x) cylinders with expanded midsections.
    • Achieved wafer-scale production of μOFRR devices (85-μm tall, 2-μm thick walls, 50–200 μm inner diameter).
    • Observed pure-mode WGMs with high Q-factors (>10^4) at a wavelength of approximately 985 nm.

    Conclusions:

    • The developed μOFRRs demonstrate robust fabrication and promising optical performance.
    • The design effectively enhances WGM confinement, suitable for sensitive detection applications.
    • These μOFRRs hold significant potential for integration into future vapor detection microsystems.