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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
Published on: January 27, 2017
Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo
F Larramendy1, L Mazenq, P Temple-Boyer
1CNRS, LAAS, 7 avenue du colonel Roche, F-31077, Toulouse, France.
Lab on a Chip
|November 10, 2011
Summary
Researchers developed a new SU-8 microfluidic channel fabrication method using UV-photolithography. This technique enables precise control over microchannel dimensions for effective capillary-driven fluid transport in lab-on-chip applications.
Area of Science:
- Materials Science
- Microfluidics
- Biochemical Microsystems
Background:
- Microfluidic devices are integral to biochemical microsystems for liquid phase analysis in medical applications.
- SU-8, an epoxy-based negative photo-resist, is widely utilized in microfabrication.
Purpose of the Study:
- To present a novel technique for fabricating microfluidic channels using SU-8.
- To demonstrate the fabrication of well-defined microchannels with controllable dimensions and aspect ratios.
Main Methods:
- Utilized a single stepper UV-photolithography process for microchannel fabrication.
- Manipulated process parameters, including optical focus depth and UV exposure dose, to control microchannel characteristics.
Main Results:
- Successfully fabricated covered microchannels with various dimensions and aspect ratios.
- Demonstrated the effectiveness of the fabricated microchannels for capillary-driven fluid transport.
Conclusions:
- The presented SU-8 microfabrication technique offers a versatile method for creating microfluidic devices.
- This approach is suitable for microanalysis and lab-on-chip applications, facilitating efficient fluid handling.
