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Published on: April 10, 2015
Dinuclear Rh(II) pyrazolates as CVD precursors for rhodium thin films
W Jeffrey McCarty1, Xiaoping Yang, Lauren J DePue Anderson
1Department of Chemistry and Biochemistry, The University of Texas at Austin, 1 University Station, A5300, Austin, Texas 78712-0165, USA.
Abstract:
New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh(2)(3-R,5-R'Pz)(4)·2L (R = R' = CF(3), L = H(2)O (1), CH(3)CN (2)) and Rh(2)(3-R,5-R'Pz)(4) (R = R' = (t)Bu (3); R = CF(3), R' = (t)Bu (4)) have been synthesized from the interaction of the lithium salt of the corresponding pyrazole with Rh(2)(OAc)(4) in diethyl ether. The complexes were characterized by X-ray crystallography and spectroscopic methods. They were further evaluated as precursors for the chemical vapor deposition (CVD) of Rh thin films using H(2) as the carrier gas. The resulting films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).
