Transmission Electron Microscopy
Overview of Electron Microscopy
Preparation of Samples for Electron Microscopy
Imaging Biological Samples with Optical Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
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Updated: May 27, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
1Beijing National Center for Electron Microscopy and Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China. ryu@tsinghua.edu.cn
Optimizing focus in aberration-corrected transmission electron microscopy is crucial for high-resolution imaging. This study reveals that the optimal focus depends on sample thickness, suggesting the midplane as a more effective reference than the exit plane.
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