Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39nm structures
M Mayer1, C Grévent, A Szeghalmi
1Max-Planck-Institute for Intelligent Systems, Heisenbergstr. 3, 70569 Stuttgart, Germany.
Ultramicroscopy
|November 18, 2011
Summary
Researchers developed a new method for fabricating Fresnel zone plates (FZPs) using atomic layer deposition and focused ion beam sectioning. This breakthrough enables unprecedented resolution in soft X-ray microscopy, advancing imaging capabilities.
Area of Science:
- Optics and Photonics
- Materials Science
- Microscopy
Background:
- Fresnel zone plates (FZPs) are state-of-the-art diffractive lenses for X-ray focusing.
- Current manufacturing techniques limit further improvements in FZP resolution.
- Novel fabrication methods are crucial for advancing X-ray microscopy.
Purpose of the Study:
- To introduce a novel method for fabricating multilayer Fresnel zone plates (FZPs).
- To demonstrate the capability of the new FZPs in soft X-ray microscopy.
- To assess the potential of this technique for high-resolution X-ray imaging.
Main Methods:
- Fabrication of multilayer FZPs using atomic layer deposition (ALD).
- Subsequent sectioning of ALD-grown multilayers using focused ion beam (FIB).
- Testing the fabricated multilayer FZP in a scanning soft X-ray microscope.
Main Results:
- Successfully fabricated a multilayer FZP operational in the soft X-ray range.
- Achieved the highest resolution to date for multilayer FZPs.
- Resolved features smaller than 39nm in a scanning soft X-ray microscope.
Conclusions:
- The novel ALD and FIB fabrication technique overcomes limitations of existing methods.
- This method offers significant potential for enhancing resolution in both soft and hard X-ray microscopy.
- The developed multilayer FZPs represent a significant advancement in X-ray focusing optics.
