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Updated: May 27, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Design of subwavelength-size, indium tin oxide (ITO)-clad optical disk cavities with quality-factors exceeding 10⁴
Ozlem Senlik1, Hwi Yoon Cheong, Tomoyuki Yoshie
1Department of Electrical and Computer Engineering, Duke University, Durham, NC 27708, USA. ozlem.senlik@duke.edu
Abstract:
Indium tin oxide is used as a top cladding electrode of optical disk resonators with subwavelength size in all dimensions. Calculated quality (Q)-factors exceed 10⁴ in visible wavelengths (650-670nm). The disk aspect ratio is an important parameter to optimize the resonator properties. The Q-factor and threshold material gain based on finite-difference time-domain method are optimized for eight different disk resonator optical modes. Proposed cavity designs are promising for building electrically-pumped, low-threshold nano-lasers at room temperature.

