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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical
K Horiba1, Y Nakamura, N Nagamura
1Department of Applied Chemistry, The University of Tokyo, Tokyo 113-8656, Japan. horiba@sr.t.u-tokyo.ac.jp
The Review of Scientific Instruments
|December 2, 2011
Summary
We developed 3D nano-ESCA, a novel system for nondestructive 3D electronic structure observation. This advanced technique enables high-resolution depth profiling and chemical analysis of solids.
Area of Science:
- Materials Science
- Surface Science
- Spectroscopy
Background:
- Nondestructive observation of 3D electronic structure is crucial for materials analysis.
- Existing methods lack sufficient spatial resolution and depth profiling capabilities.
Purpose of the Study:
- To develop a scanning photoelectron microscope system for 3D spatially resolved electronic structure observation.
- To achieve depth profiling capabilities in electron spectroscopy for chemical analysis (ESCA).
Main Methods:
- Utilized a Fresnel zone plate for X-ray focusing (35 nm outermost zone width).
- Employed a modified high-resolution angle-resolved electron spectrometer with a 60° acceptance angle.
- Installed the system at SPring-8 BL07LSU beamline.
Main Results:
- Achieved a total spatial resolution better than 70 nm.
- Demonstrated pinpoint depth-profile analysis.
- Showcased high-resolution chemical state analysis capabilities.
Conclusions:
- The 3D nano-ESCA system enables nondestructive 3D spatially resolved electronic structure analysis.
- The system offers advanced capabilities for depth profiling and chemical state analysis.
- This technology advances the understanding of solid-state materials.
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