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Updated: May 27, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
I S Bozchalooi1, K Youcef-Toumi, D J Burns
1Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
High-speed atomic force microscopy (AFM) faces challenges with imaging speed due to scanner dynamics. This study introduces a feedforward control mechanism to compensate for these dynamics, enhancing AFM imaging performance.
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