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Advances in top-down and bottom-up surface nanofabrication: techniques, applications & future prospects
Abhijit Biswas1, Ilker S Bayer, Alexandru S Biris
1Center for Nano Science and Technology (NDnano), Department of Electrical Engineering, University of Notre Dame, Notre Dame, IN 46556, USA. abiswas@nd.edu
Advances in Colloid and Interface Science
|December 14, 2011
Summary
This review covers key nanofabrication advances over the last decade, focusing on top-down and bottom-up methods for creating functional nano-devices and nanocomposites.
Area of Science:
- Materials Science and Engineering
- Nanotechnology
- Device Fabrication
Background:
- Nanofabrication is crucial for developing advanced functional nano-devices.
- The past decade has seen significant progress in both top-down and bottom-up approaches.
- A comprehensive overview of these techniques is needed to guide future research.
Purpose of the Study:
- To review significant nanofabrication techniques developed over the last decade.
- To focus on methods applicable to the fabrication of functional nano-devices.
- To provide a platform for developing new or hybrid nanofabrication techniques.
Main Methods:
- Review of top-down nanofabrication techniques, including advanced lithography (optical, electron beam, soft, nanoimprint, scanning probe, block copolymer).
- Discussion of bottom-up nanofabrication techniques (atomic layer deposition, sol-gel, molecular self-assembly, vapor-phase deposition, DNA-scaffolding).
- Specific focus on advances in fabricating functional nanocomposites and graphene via chemical and physical vapor deposition.
Main Results:
- Detailed overview of multi-directional patterning capabilities (≤100 nm) in top-down methods.
- Highlights progress in various bottom-up techniques for nanoelectronic applications.
- Demonstrates advancements in creating functional nanocomposites and graphene.
Conclusions:
- The reviewed nanofabrication techniques are pivotal for creating novel functional nanostructured devices.
- This comprehensive platform facilitates the development of new and hybrid nanofabrication strategies.
- Continued innovation in nanofabrication is essential for the advancement of nanotechnology.

