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Modeling of beams' multiple-contact mode with an application in the design of a high-g threshold microaccelerometer

Kai Li1, Wenyuan Chen, Weiping Zhang

  • 1Key Laboratory for Thin Film and Microfabrication of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, China. iamkaili@gmail.com

Sensors (Basel, Switzerland)
|December 14, 2011
PubMed

Keywords:
beamhigh-gmultiple-contact modethreshold microaccelerometer

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