Density doubling of block copolymer templated features

Nathanael L Y Wu1, Xiaojiang Zhang, Jeffrey N Murphy

  • 1National Institute for Nanotechnology (NINT), National Research Council, 11421 Saskatchewan Drive, Edmonton, Alberta T6G 2M9, Canada.

Nano Letters
|December 16, 2011
PubMed
Summary

Block copolymers can template nanopatterns. This study shows how multilayered domains double pattern density by controlling film thickness and solvent annealing for denser lines, compatible with graphoepitaxy.

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