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Updated: May 26, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Three-dimensional reconstructions of electrostatic potential distributions with 1.5-nm resolution using off-axis
Toshiaki Tanigaki1, Shinji Aizawa, Takahiro Suzuki
1Advanced Science Institute, RIKEN, Hirosawa 2-1, Wako, Saitama 351-0198, Japan. tanigaki-toshiaki@riken.jp
Abstract:
Three-dimensional (3D) reconstruction experiments were carried out by observing high-resolution 3D electrostatic potential distributions of Pt nanoparticles using off-axis electron holographic tomography. These Pt nanoparticles were mounted on the surfaces of amorphous silicon pillars. In order to realize high-resolution observation, we developed a mechanically stable 3D specimen holder with small specimen drifts and vibrations. From the 3D electrostatic potential distribution data of Pt nanoparticles (2.0 nm in diameter), we obtained the resolution of 1.5 nm.
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