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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Dual-wavelength slightly off-axis digital holographic microscopy
Junwei Min1, Baoli Yao, Peng Gao
1State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, China.
Applied Optics
|January 25, 2012
Summary
Dual-wavelength digital holographic microscopy extends axial measurement range to micrometers using a synthesized beat wavelength. This method enables real-time specimen measurement with high wavelength selectivity.
Area of Science:
- Optics and Photonics
- Microscopy Techniques
- Metrology
Background:
- Digital holographic microscopy (DHM) is a powerful tool for 3D imaging.
- Traditional DHM faces limitations in axial measurement range due to phase ambiguity.
- Extending the measurement range is crucial for various applications.
Purpose of the Study:
- To introduce a dual-wavelength digital holographic microscopy technique.
- To enhance the axial measurement range of DHM without phase ambiguity.
- To demonstrate real-time measurement capabilities.
Main Methods:
- Utilizing a dual-wavelength configuration with a slightly off-axis setup.
- Synthesizing a beat wavelength (157 nm separation) to extend the unambiguous axial range.
- Employing a Bayer mosaic filtered color CCD camera for high wavelength selectivity and real-time acquisition.
Main Results:
- Achieved an extended axial measurement range in the micrometer scale.
- Demonstrated real-time measurement of specimens.
- Validated the technique's practicability through experiments on a vortex phase plate and a rectangular phase step.
Conclusions:
- The proposed dual-wavelength DHM effectively overcomes the axial range limitation of conventional DHM.
- The technique offers a practical solution for real-time, high-resolution 3D metrology.
- This advancement has potential applications in fields requiring precise microscopic measurements.

