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Capacitive micro pressure sensor integrated with a ring oscillator circuit on chip.

Ching-Liang Dai¹, Po-Wei Lu, Chienliu Chang

¹Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan;

Sensors (Basel, Switzerland)

|February 4, 2012

Summary

This summary is machine-generated.

A novel capacitive micro pressure sensor, integrated with a ring oscillator circuit, achieves high sensitivity. This chip-based sensor converts capacitance to frequency, offering a cost-effective solution for pressure measurement.

Keywords:

CMOS-MEMS micro pressure sensors ring oscillators

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Area of Science:

Microelectromechanical systems (MEMS)
Integrated circuit design
Sensor technology

Background:

Capacitive pressure sensors are widely used due to their sensitivity and stability.
Integrating sensors with readout circuitry on a single chip reduces system complexity and cost.
Ring oscillators offer a simple and effective method for converting analog capacitance variations into a digital frequency output.

Purpose of the Study:

To develop and characterize a chip-based capacitive micro pressure sensor integrated with a ring oscillator.
To leverage commercial complementary metal oxide semiconductor (CMOS) processes for sensor fabrication.
To evaluate the sensor's performance, particularly its sensitivity and pressure range.

Main Methods:

Fabrication of the capacitive pressure sensor using a commercial CMOS process with a post-processing step.
Integration of a ring oscillator circuit to convert sensor capacitance to frequency.
Design of the sensor with 16 parallel sensing cells, each featuring a sandwich membrane structure.
Utilization of a low-cost, easy-to-execute post-process involving sacrificial layer etching to release membranes.

Main Results:

The integrated capacitive micro pressure sensor demonstrates a high sensitivity of 7 Hz/Pa.
The sensor operates effectively within a pressure range of 0-300 kPa.
The post-CMOS process for membrane release is confirmed to be both easy to execute and low-cost.

Conclusions:

The developed chip-based capacitive micro pressure sensor with an integrated ring oscillator offers a promising solution for pressure sensing applications.
The combination of CMOS fabrication and a cost-effective post-process enables efficient sensor production.
The high sensitivity achieved makes this sensor suitable for various pressure monitoring needs.